Smart sensors are sensors with integrated function logic functions, two-way communication, make decisions.
There are very convincing advantages of using silicon technology in the construction of smart sensor. All integrated circuits employ silicon technology. A smart sensor is made with the same technology as integrated circuits. A smart sensor utilizes the transduction properties of one class of materials and electronic properties of silicon (GaAs). A transduction element either includes thin metal films, zinc oxide and polymeric films. Integrating electronics circuits on the sensor chip makes it possible to have single chip solution. Integrated sensors provide significant advantages in terms of overall size and the ability to use small signals from the transduction element [1]. The IC industry will get involved in smart sensor if a very large market can be captured and the production of smart sensor does not require non-standard processing steps.